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What's New
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BRAND NEW! Spintech S-100 series manual spinner capable of processing chips to 9" round, wafers, disks, or 7" x 7" square substrates. System comes with: One photoresist pump, 12" bowl with aero-dynamic design and exhaust, digital timers, Menu driven fully programmable controller displays Steps, Time, Speed, Operating functions, and troubleshooting. Controller capability has 40 programs with 16 steps in each program. Cover and chuck lift for easy loading of substrates, speed control 100-7500rpm with brushless motor. System safety features are: vacuum interlock, cover interlock, spindle down interlock, drain sensor interlock.
- Spin Speed holding speed- +/- 10 Rpm's
- Acceleration / deceleration adjustable 0-50 KRPS
- current amperage 5 amp 120vac 50/60HZ
Basic process functions: - Solvent Dispense
- N2 Blow off
- Coat
- Spread with ramp
- Spin
Spintech S-100 series Coater Options: - Top Edge Bead Removal, step is after dispense, includes 3 gallon pressure vessel
- Bottom Edge Bead Removal, step after dispense, includes 3 gallon pressure vessel
- Extra Photoresist pumps for Dispenses, step has to added to system
- Top or BottomWash, includes 3 gallon pressure vessel
- Catch Cup Rinse, cycle after dispense, includes 3 gallon canister
- Chucks, Round for sizes 3"-8" wafers price
- Chucks, Round 2" to chip chucks
- Chucks, Squares 2" to 7" (Special chucks will be quoted per job and customers specs.)
- Centering device to match chuck and wafer for easy centering of substrate or wafer
- Vacuum pump with 20-25 inches of vacuum to be mounted in cart cabinet for systems with carts or mounted on floor of FAB next to system
- Remote start and stop switch for systems mounted in table tops and wet benches
- Stainless Steel Cabinet (Optional)
- Polypropylene cabinet (Standard)
Spintech S-100S-Cart for mounting Spintech S-100 Series manual spinner inside a mobile cart. Approximate Dimensions of the cart is 22" length x19 " wide x 36" tall deck height (3ft without casters and Spintech unit.) (Subject to change)
NEW ! Spintech S-1400C manual spin coater capable processing up to 300mm wafers or 14" x 14" substrates. System comes with: One Photoresist Pump, Menu driven fully programmable controller displays Steps, Time, Speed, Operating functions, and troubleshooting Controller capability has 40 programs with 16 steps in each program, cabinet for table top or mounting in section of table included, Spindle chuck lift and cover lift included for easy loading of substrates, speed control 100-7500rpm with brushless motor. System safety features are: vacuum interlock, cover interlock, spindle down interlock, drain sensor interlock. - Spin Speed holding speed- +/- 10 Rpm's
- Acceleration / deceleration adjustable 0-50 KRPS
- Current amperage 5 amp 120vac 50/60HZ
Basic process functions: - Solvent Dispense
- N2 Blow off
- Coat
- Spread with ramp
- Spin
Spintech S-1400 stand alone cart for supporting S-1400 manual spinners. Cart comes new with, Casters, Leveling pads for coaters, set up with drain container for coaters or house drain for developers and scrubbers. Spintech S-1400 series Coater Options: - Top Edge Bead Removal, step is after dispense, includes 3 gallon pressure vessel
- Bottom Edge Bead Removal, step after dispense, includes 3 gallon pressure vessel
- Extra Photoresist pumps for Dispenses, step has to added to system
- Top or BottomWash, includes 3 gallon pressure vessel
- Catch Cup Rinse, cycle after dispense, includes 3 gallon canister
- Chucks, Round for sizes 3"-8" wafers
- Chucks, Round 2" to chip chucks
- Chucks, Squares 2" to 7" (Special chucks will be quoted per job and customers specs.)
- Centering device to match chuck and wafer for easy centering of substrate or wafer
- Vacuum pump with 20-25 inches of vacuum to be mounted in cart cabinet for systems with carts or mounted on floor of FAB next to system
- Remote start and stop switch for systems mounted in table tops and wet benches. (Optional)
- Stainless Steel Cabinet (Optional)
- Polypropylene cabinet (Standard)
Spintech S-1400S-Cart for mounting Spintech S-1400 Series manual spinner inside a mobile cart. Comes with casters and leveling foot pads.
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